Mass Transport Of Beta-Diketonate Precursors For Mocvd Of Yba2cu3o7-Delta High T-C Superconducting Thin Films

Gy Meng,Zh Yuan,Ph Yang,Dk Peng
IF: 3.1
1996-01-01
Chemical Research in Chinese Universities
Abstract:Mass transport of Y(dpm)(2), Ba(dpm)(5) . OH . 2H(o) and Cu(dpm)(2) by a carrier gas(argon) was theoretically considered and experimentally studied as a function of the system with operating parameters including temperature, carrier gas flow rate and system pressure. The experimental results are in a good agreement with the theoretical prediction. The mechanism of mass transport of these organometallic precursors and their use for YBCO film stoichiometry control and reproducibility are discussed.
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