Highly Sensitive Visible-Blind Extreme Ultraviolet Ni/4H-SiC Schottky Photodiodes with Large Detection Area.

Jun Hu,Xiaobin Xin,Jian H. Zhao,Feng Yan,Bing Guan,John Seely,Benjawan Kjornrattanawanich
DOI: https://doi.org/10.1364/ol.31.001591
IF: 3.6
2006-01-01
Optics Letters
Abstract:Ni/4H-SiC Schottky photodiodes of 5 mm x 5 mm area have been fabricated and characterized. The photodiodes show less than 0.1 pA dark current at -4 V and an ideality factor of 1.06. A quantum efficiency (QE) between 3 and 400 nm has been calibrated and compared with Si photodiodes optimized for extreme ultraviolet (EUV) detection. In the EUV region, the QE of SiC detectors increases from 0.14 electrons/photon at 120 nm to 30 electrons/photon at 3 nm. The mean energy of electron-hole pair generation of 4H-SiC estimated from the spectral QE is found to be 7.9 eV.
What problem does this paper attempt to address?