High-Performance 4H-SiC Schottky Photodiode With Semitransparent Grid-Electrode for EUV Detection

Rong Zhang,Youdou Zheng,Dunjun Chen,D. Pan,Zhiyuan Wang,F. Ren,Dong Zhou,Hai Lu,Weizong Xu
DOI: https://doi.org/10.1109/LPT.2020.2996308
IF: 2.6
2020-07-01
IEEE Photonics Technology Letters
Abstract:In this work, a $2.5\times 2.5$ mm2 large-area 4H-SiC Schottky barrier photodiode with a grid-shaped semitransparent metal electrode is designed and fabricated for extreme ultraviolet (EUV) detection. The photodiode shows an ultra-low leakage current of ~3 pA under 20 V reverse bias at room temperature. Based on a synchrotron radiation source, the photo-response characteristics of the photodiode is measured between 5 nm and 140 nm, which show considerably higher responsivity than that of the control whole electrode device. The higher quantum efficiency of the grid-electrode device benefits from considerable lateral depletion of the SiC surface light absorption layer between adjacent electrode strips, which occurs even under zero bias. The device further exhibits good potential for high temperature operation.
Materials Science,Engineering,Physics
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