Study on Multifractal Spectrum of Semicontinuous Ag Films

SUN Zhao-qi,LU Jian-guo,GAO Qing-wei
DOI: https://doi.org/10.3969/j.issn.1000-6281.2006.01.006
2006-01-01
Abstract:The topography of semicontinuous Ag films with thickness from 1.5nm to 67nm deposited by DC magnetron sputtering was measured with a transmission electron microscope(TEM).We quantitatively charactered inhomogeneous surface distribution and size distribution of Ag islands by means of multifractal theory.Multifractal spectra f(α)~α show that the spectrum width Δα increased with increasing the thickness at first,and decreased later.It indicates that the inhomogeneous surface distribution of Ag islands also increased at first,and decreased later.Size distribution of Ag islands transited from Ag islands of minimum volume playing important roles to Ag islands of maximum volume playing important roles when the thickness of thin film was beyond a certain critical value(between 12nm and 67nm).
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