Fractal Description of Surface Topography of Ultrathin Au Films

LV Jian-guo,SONG Xue-ping,SUN Zhao-qi
2010-01-01
Abstract:Surface topography of ultrathin Au films with different thicknesses,prepared by direct current magnetron sputtering technique,was analyzed by atomic force microscopy.Power spectral density was used to calculate fractal dimension of the ultrathin Au films.The results show that as sputtering time increases,the fractal dimension of Au films decreases from 2.579 to 2.500 in high frequency region,and that of Au films increase from 2.607 to 2.819 in low frequency region.The surface topography of Au films has multi-scale feature.Multifractal spectra show that the spectrum width α of Au films changes from 0.051 to 0.118,indicating that surface roughness of Au films increases with increasing sputtering time.The f of samples are positive,suggesting that the number of highest peak sites greater than that of lowest valley sites.
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