Dopant Effects on Defects in GaN Films Grown by Metal-Organic Chemical Vapour Deposition

M Lu,H Yang,ZL Li,ZJ Yang,ZH Li,Q Ren,CL Jin,S Lu,B Zhang,GY Zhang
DOI: https://doi.org/10.1088/0256-307x/20/9/341
2003-01-01
Chinese Physics Letters
Abstract:The effects of dopants on the defects of GaN films were investigated by using different methods, such as wet, etching of pits, x-ray diffraction and photoluminescence (PL). Three kinds of the samples were prepared with different dopants, that is, nominally undoped, Si-doped and Mg-doped GaN films. It was found that the lowest density of the, etched pit was existed in the nominally undoped GaN, while the highest in the Mg-doped sample. The effects of the dopants on the, etching pits were discussed.
What problem does this paper attempt to address?