Abstract:Transition metal silicide nanowires exhibit low resistivity, great thermal stability and excellent mechanical strength, contributing to their applications as interconnection and contact materials for future integrated circuits devices. In this work, we successfully fabricated two kinds of chromium silicide/silicon heterostructure nanowires through solid state reactions - bare Si/Cr3Si nanowires and Si/Cr5Si3-Al2O3 core-shell nanowires. The growth behaviors and diffusion mechanisms of the two silicide heterostructure nanowires were investigated with in-situ TEM at 700 degrees C. During the growth of chromium silicide nanowires, unique amorphous Si phase would form first in front of silicide nanowires. Also, we found that oxide-shell could control the diffusion process in silicon nanowires. With oxide-shell, compression stress would restrain the growth of chromium silicide in the radial direction but accelerate its growth rate in the axial direction. Additionally, Al2O3 shell reduced the radial expansion of chromium silicide nanowires and hindered Cr-rich phases with Cr5Si3 appearing as the first phase. The crystal structures of the nanowires have been identified to be single-crystalline A15 and D8m type structure of the intrinsic Cr3Si nanowires and Cr5Si3 nanowires, respectively. In addition to fundamental science, the significant study is beneficial for future processing techniques in nanotechnology and related applications. (C) 2019 Elsevier Ltd.

RARE-EARTH METAL SILICIDE NANOSTRUCTURES ON Si(001) SURFACE

Rare Earth Metal Silicides Synthesized by High Current Metal Ion Implantation

Growth of Zirconium Silicide Nanostructures on Vicinal and Flat Si(111)-7 × 7 Surfaces

From Nanowires To Nanoislands: Morphological Evolutions Of Erbium Silicide Nanostructures Formed On The Vicinal Si(001) Surface

Growth of Erbium Silicide Nanowires on Si(001) Surface Studied by Scanning Tunneling Microscopy

Surface structures of erbium silicide ultra-thin films formed by solid phase epitaxy on Si(100)

Erbium Silicide Nanostructures Self-Assembled on Si(001) by Cyclic Growth

Growth Mechanism and Modification of Electronic and Magnetic Properties of Silicene

Structural Understanding of Self-Assembled Rare Earth Disilicide Nanostructures Via Scanning Probe Microscopy and First Principles Studies

Formation of the Schottky barrier at (3 × 1)NaSi(111) surface

Hybrid Metal-Insulator-metal Structures on Si Nanowires Array for Surface Enhanced Raman Scattering

Crystalline Structures and Misfit Strain Inside Er Silicide Nanocrystals Self-Assembled on Si(001) Substrates

Phase-controlled Synthesis of Nickel Silicide Nanostructures

Transmission electron microscopy characterization of the erbium silicide formation process using a Pt/Er stack on a silicon-on-insulator substrate

Preparation Of Rare Earth Silicides And Its Progress

Structure and Orientation Analysis of Iron Silicide Epitaxially Grown on Si Substrates

Thermal Stability and Growth Behavior of Erbium Silicide Nanowires Self-Assembled on a Vicinal Si(OOl) Surface

Field Emission from Rare-Earth Silicides

Scanning Tunneling Microscopy Studies Of The Formation And Coarsening Of Manganese Silicides On Si(111)

Surface-Morphology Study of Titanium Silicide Formed on Polycrystalline Silicon

Unique Amorphization-Mediated Growth to Form Heterostructured Silicide Nanowires by Solid-State Reactions