Growth Mechanism of IBAD-YSZ Thin Film on Hastelloy Substrates

王志,史锴,冯峰,陈欢,韩征和
2008-01-01
Rare Metal Materials and Engineering
Abstract:Biaxially textured yttria stabilized zirconia (YSZ) (001) thin films, as buffer layers of coated conductors, were deposited on hastelloy substrates by ion beam assisted sputtering deposition (IBAD) method with different assisting beam current density Ja and assisting ion energy Ei. The results of X-ray diffraction show that biaxially textured YSZ buffer layer can be obtained within an appropriate Ja anf Ei range. It is found that with Ja and Ei increasing, the orientation degree of the film initially increases and then decreases, which is explained in the paper by anistropic damage of assisting ions.
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