Elevated-Confined Phase-Change Random Access Memory Cells

Lee Hock Koon,Shi Luping,Zhao Rong,Yang Hongxin,Lim Kian Guan,Li Jianming,Chong Tow Chong
DOI: https://doi.org/10.1143/jjap.49.04dd16
IF: 1.5
2010-01-01
Japanese Journal of Applied Physics
Abstract:A new elevated-confined phase-change random access memory (PCRAM) cell structure to reduce power consumption was proposed. In this proposed structure, the confined phase-change region is sitting on top of a small metal column enclosed by a dielectric at the sides. Hence, more heat can be effectively sustained underneath the phase-change region. As for the conventional structure, the confined phase-change region is sitting directly above a large planar bottom metal electrode, which can easily conduct most of the induced heat away. From simulations, a more uniform temperature profile around the active region and a higher peak temperature at the phase-change layer (PCL) in an elevated-confined structure were observed. Experimental results showed that the elevated-confined PCRAM cell requires a lower programming power and has a better scalability than a conventional confined PCRAM cell.
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