Abstract:To improve the response speed of optical switches in the optical communication networks,a SiO2/polymer hybrid waveguide structure is used in the design and fabrication of the Y branch thermo-optical switch.The silica with large thermal conductivity is adopted as the lower cladding of the waveguide.The low cost polymer of poly(methyl methacylate-glyciclyl methacrylate) with favorable optical properties is adopted as the core and upper cladding material.The optical field propagation is simulated by beam propagation method(BPM).According to optical mode calculations by Matlab,the width and height of this hybrid waveguide are optimized to be 3.5 μm.Through methods of spin-coating,photolithography and inductively coupled plasma etching,the switch waveguide is fabricated.Characterization by scanning electron microscope(SEM) shows that the polymer waveguide has a vertical sidewall and square configuration,which is favorable for the confinement of optical mode and the reduction of optical loss.The experimental results indicate that the optical insert loss and extinction ratio of the fabricated switch are 12 dB and 18 dB,respectively.Since hybrid waveguide structure can improve the diffusion of the thermal field in the waveguide and reduce the response time effectively,the rise time an fall time are only 200 μs.This switching speed is faster than that of thermo-optic switches adopting polymer as the lower cladding.

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