Cu Metallization of LTCC Substrate by Co-Firing Process in N2 Atmosphere

Wang Yan,Liu Yang,Ma Jusheng
DOI: https://doi.org/10.3321/j.issn:1002-185x.2007.z2.129
2007-01-01
Rare Metal Materials and Engineering
Abstract:LTCC green sheets were prepared by tape casting with PMMA binder. The slurry for tape casting exhibited a typical shear thinning behavior. The surface of the green tape was smooth and the lamination with uniform microstructure was achieved by hot pressing. The results of TGA, DTA and FTIR show that the main pyrolysis mechanism for PMMA in high purity N-2 when low temperature phase (below 600 degrees C) is depolymerization mechanism. The degraded products were methyl methacrylate monomer. After cofired with LTCC, the Cu metallization film was dense and well interconnected. The sheet resistance of Cu conductor was less than 5m ohm/square.
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