Research on Copper Circuit Metalization of LTCC in N2 Atmosphere

Zhonghua XU,Jusheng MA,Zhenyu HAN,Xiangyun TANG
DOI: https://doi.org/10.3321/j.issn:1001-9731.2000.05.018
2000-01-01
Abstract:This paper concentrates on the organic removal and copper circuit oxidation of low temperature cofired ceramics sintering in N2 atmosphere. With the thermal analysis of glass-ceramics sheet, we find organics are removed largely between 150-500°C. Micrographic picture and EDS show that, if fired in dry N2, substrate will keep certain amount of carbon. This makes a bad influence on the substrate strength and the copper circuit's adhesion; when the substrate is fired in humid N2, the organics are removed completely, and the copper is seriously oxidized.
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