Research of LTCC Technology of Silver-Base Multilayer AIN Ceramic Substrates

戎瑞芬,汪荣昌,顾志光
DOI: https://doi.org/10.3969/j.issn.1003-353x.2004.03.012
2004-01-01
Abstract:The process of organic vehicle evacuation of AlN green tape and Ag conductor pastehave been researched in the view of LTCC technology, and optimum condition of organic vehicleevacuation temperature and cofiring atmosphere have been determined. The result shows that thebest comprehensive properties of silver conductor multilayer AlN ceramic substrates can beenachieved by two-step organic vehicle evacuation technology and cofire the substrate using mixedatmosphere gases of nitride and micro fraction of oxide.
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