Mg acceptors activation mechanism and hole transport characteristics in highly Mg-doped AlGaN alloys
Qing-Jun Xu,Shi-Ying Zhang,Bin Liu,Zhen-Hua Li,Tao Tao,Zi-Li Xie,Xiang-Qian Xiu,Dun-Jun Chen,Peng Chen,Ping Han,Ke Wang,Rong Zhang,You-Dou Zheng
DOI: https://doi.org/10.1088/1674-1056/ab7e93
2020-01-01
Chinese Physics B
Abstract:The Mg acceptor activation mechanism and hole transport characteristics in AlGaN alloy with Mg doping concentration (similar to 10(20) cm(-3)) grown by metal-organic chemical vapor deposition (MOCVD) are systematically studied through optical and electrical properties. Emission lines of shallow oxygen donors and (V-III complex)(1-) as well as V-N(3+) and neutral Mg acceptors are observed, which indicate that self-compensation is occurred in Mg-doped AlGaN at highly doping levels. The fitting of the temperature-dependent Hall effect data shows that the acceptor activation energy values in Mgdoped AlxGa1-xN (x = 0.23, 0.35) are 172 meV and 242 meV, and the hole concentrations at room temperature are 1.2 x 10(18) cm(-3) and 3.3 x 10(17) cm(-3), respectively. Therefore, it is believed that there exists the combined effect of the Coulomb potentials of the dopants and screening of the Coulomb potentials by a high hole concentration. Moreover, due to the high ionized acceptors' concentration and compensation ratio, the impurity conduction becomes more prominent and the valence band mobility drops sharply at low temperature.