Design and preparation of micro-valve driven bythermal expansion

WU Yuan-qing,YAO Su-ying
DOI: https://doi.org/10.3969/j.issn.1000-9787.2012.10.030
2012-01-01
Abstract:Structure analysis and design on thermal expansion driven micro-valve is carried out,using IntelliSuite software,and effect of factors,such as structure of micro-heater,which influences micro-valve is discussed.The model for PDMS micro-valve is made using SU—8 glue moulding process.The whole process of micro-valve preparation is divided into four parts as metal deposit of thin-film micro-heater,preparation of micro-valve elastic thin film and fluid flow passage,and fabrication process of every part and the bonding technique are stated.The property of micro-valve is improved by microprocessing.Pump is used as driving source of fluid,when the driving voltage of micro-valve reach up to 9V,the micro-valve is closed successfully.
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