Optimization design of actuator in silicon micro-valve for large flow applications

Yong-jun LI,Sheng-chang ZHANG,Fei DUAN,Ning DENG
DOI: https://doi.org/10.13873/J.1000-9787(2015)09-0080-03
2015-01-01
Abstract:Design a silicon micro-valve-based micro-fluidic chip and optimal design of V-shape actuator is carried out based on electro-thermal coupling theory. By constructing the optimal model for temperature distribution,the V-shape electro-thermal micro-actuator with variable section is designed for micro fluidic silicon micro-valves,and multi-physical field simulation is carried out on actuator after optimization. Results show that compared with actuators with constant section,for same displacement,the required highest temperature rise of the optimized actuator is reduced by 7. 14 %,it shows more uniform distributions of temperature and stress in which means better thermal equilibrium and structural stability.
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