Design and Fabrication of a Metal-Silicon Actuator With Low Voltage, Low Power Consumption and Large Displacement

Jun Dai,Ying Bu,Jin Xie,Kaiquan Li,Zhuang Xiong,Bin Tang,Qi Tao,Mingyuan Gao
DOI: https://doi.org/10.1109/JMEMS.2021.3079362
IF: 2.829
2021-01-01
Journal of Microelectromechanical Systems
Abstract:The V-shaped electrothermal actuator has gained significant popularity as it was demonstrated to be a compact, stable and high rectilinear displacement device. However, existing electrothermal actuators usually require the driven voltage as high as several tens of volts to realize large displacements, imposing restrictions on the actuator’s integration in miniature mobile mechatronic systems. The ...
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