Flow behavior through microfluidic valves

Xiaoning Jiang,Zhaoying Zhou,Yong Li.,Yue Yang,Xiongying Ye
1996-01-01
Abstract:Microvalves are the important components in the microfluid control systems. The flow behavior through two major types of silicon microvalves, with and without moving parts inside, were discussed in this paper. The silicon valves with different flexible flaps and the silicon nozzle/diffuser elements were designed and fabricated for the experimental research. The regression curve of the measurement results of the micro flap valve with the out port size of 200��200��m agree with the theoretical analytical model well. The flow coefficients through silicon nozzle/diffuser elements with the conical angle in width of 5�� , 7.5�� and 10�� and the length of 3 mm as well as the relation between the flow resistance ratio of nozzle to diffuser and the geometric parameters were obtained.
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