A Silicon-On-Insulator Based Micro Check Valve

M Hu,HJ Du,SF Ling,YQ Fu,QF Chen,L Chow,B Li
DOI: https://doi.org/10.1088/0960-1317/14/3/010
2004-01-01
Journal of Micromechanics and Microengineering
Abstract:In this paper we present a bulk micromachined check valve with very high frequency and extremely low leak rates. The valve is designed to have a hexagonal orifice, a hexagonal membrane flap and three flexible tethers. The three elbow-shaped flexible tethers are used to secure the membrane flap to the valve seat and to obtain large flap displacement in the forward flow direction. A silicon-on-insulator wafer and deep reactive ion etching technology are used to implement this microvalve. A very simple fabrication process has been developed, and only two photolithographic masks are required. Preliminary fluidics testing on a 1.44 mm size check valve was performed. A maximum flow rate (deionized water) of 35.6 ml min(-1) was obtained at a forward pressure of 65.5 kPa, and only negligible leakage rate was observed at a reverse pressure of up to 600 kPa. The frequency response of the valve in air was also measured and its first resonance frequency was found at 17.7 kHz.
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