Normally Closed Shape-Memory-Alloy Microvalve for Microflow Control

Min DU,Xiong-ying YE,LIULi-tao,SHILiu-jia
DOI: https://doi.org/10.3969/j.issn.1672-6030.2011.06.015
2011-01-01
Abstract:A novel normally closed shape-memory-alloy (SMA) microvalve was presented in this paper.The microvalve consists of an elastomer channel structure and an SMA bridge.The pulling force generated due to phase transition of the SMA wire is harnessed to open the normally closed microvalve.The breaking pressure of the SMA microvalve is about 4 000 Pa.The microvalve shows the on-off switching time of 0.6 s and 1.0 s,respectively.The flowrate regulation range of the microvalve is 6.7-75.2 μL/min by adjusting the driving electrical current from 0.14 A to 0.30 A.The construction of the microvalve includes soft lithography of polydimethylsiloxane (PDMS) and SMA wire assembly on a printed circuit board (PCB) substrate.
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