Preparation of Normally Open Microvalves with Fluorinated Ethylene Propylene Membrane and Poly(methyl Methacrylate) Substrates

Shanshi Huang,Qiaohong He,Hengwu Chen,Jiang Huang
DOI: https://doi.org/10.1007/s10404-012-1052-1
2012-01-01
Microfluidics and Nanofluidics
Abstract:Substitution of PDMS membrane with fluorocarbon membrane serving as the actuating elements has been reported in preparation of normally closed pneumatic valves, but rarely reported in fabrication of normally open valves. We presented a photoresist-free method to fabricate normally open valves using fluorinated ethylene propylene (FEP) film as the actuating membrane to close PMMA-based microfluidic channels. An arched FEP film top wall of compressed-gas-filled channel was used as the relief pattern to prepare a positive epoxy resin stamp, which was employed to hot-emboss the fluid channels with round cross section into PMMA substrates. An adhesive-assisted bonding technique was used to irreversibly bond the PMMA substrates to the FEP membrane. The chemical resistance, small molecule absorption and valve/pump properties of the fabricated pneumatic valves were characterized.
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