Design And Fabrication Of A Silicon Microvalve For Large Flow Application

Yongjun Li,Ning Deng,Xian Huang,Shengchang Zhang
DOI: https://doi.org/10.1109/icept.2015.7236802
2015-01-01
Abstract:this paper presents a normally closed Electro-thermal driven 3-way gate micro-valve which is able to meet the requirements of industrial applications like large flow rate and high pressure. The micro-valve consists of three layers of glass-silicon-glass bonded together. The total chip size of the valve is 10mm(star)8.2mm, with a thickness of 1.32mm. The lateral thickness of the actuator and movable parts in the silicon layer is 300 mu m. The experimental results show that a mechanical linkage capable of over 150 mu m of motion is realized under a voltage of 6V, which is good enough for control the valve.
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