Characteristics Of Gas Flow Within A Micro Diffuser/Nozzle Pump
Li Xiu-Han,Yu Xiao-Mei,Zhang Da-Cheng,Cui Hai-Hang,Li Ting,Wang Ying,Wang Yang-Yuan,李修函,于晓梅,张大成,崔海航,李婷,王颖,王阳元
DOI: https://doi.org/10.1088/0256-307X/23/5/046
2006-01-01
Chinese Physics Letters
Abstract:The gas flow characteristics for various shapes of micro diffuser/nozzles have been experimentally investigated. The micro diffuser/nozzles with the lengths of 70 mu m, 90 mu m, 125 mu m and the taper angles of 7 degrees, 10 degrees, 14 degrees are designed and fabricated based on silicon micromachining technology for optimizing and comparing. The flat-wall diffuser/nozzle is 40 mu m x 5 mu m in depth and width. An experimental setup is designed to measure the gas flow rates under controlled temperature and pressure condition. Optimized values for the taper angle and the length of the diffuser/nozzle are experimentally obtained.