On the PZT/Si Unimorph Cantilever Design for the Signal-to-noise Ratio Enhancement of Piezoelectric MEMS Microphone
Chen,Sung-Cheng Lo,Shaoda Wang,Yi-Jia Wang,Mingching Wu,Weileun Fang
DOI: https://doi.org/10.1088/1361-6439/ac1eef
2021-01-01
Journal of Micromechanics and Microengineering
Abstract:This study presents the design, fabrication, and testing of a novel piezoelectric micro-electro-mechanical-systems microphone with the partially removed lead zirconate titanate (PZT) unimorph structure for signal-to-noise ratio (SNR) enhancement. To demonstrate the feasibility of the presented concept, the unimorph cantilever array with the patterned (triangular shape) PZT film on top of a rectangular Si layer is simulated, fabricated, and tested. In comparison, the rectangular and triangular unimorph cantilever arrays with fully covered PZT film are also investigated. The proposed and reference cantilever arrays have the same foot print for fair comparison. Simulations show the proposed design has the highest output electrical energy which indicates the proposed design could successfully enhance the SNR. Moreover, acoustic measurements in the standard anechoic box show the proposed Si cantilever with patterned PZT film design could significantlyimprove the SNR. As compared to the reference microphone with triangular PZT/Si unimorph cantilever, the proposed design shows a 9.8 dB enhancement in SNR. Finally, the influences of initial structure deflections (due to the thin film residual stresses) on the low frequency responses for proposed and reference microphone designs are also investigated.