Abstract:This study presents the piezoelectric microspeaker design consisted of the central-diaphragm, connecting-spring, and cantilever-plate actuators to create two resonances in the desired frequency range. In addition to the cantilever-plate actuator, the electrical routing and piezoelectric film are designed to drive the central-diaphragm independently. According to the stress distributions on the microspeaker structure for both lower and higher modes, the all-pass filter circuit is designed and implemented to manage the phase of input signals to the central-diaphragm, thereby changing the motion of the proposed design. Thus, the sound pressure level (SPL) beyond 1 kHz is improved and the SPL zero at specific frequency range is avoided. As a result, the bandwidth enhancement is achieved by the proposed microspeaker. Measurements are conducted under 0.707 V rms with 9 V DC driving voltage in standard ear simulator to evaluate the performances of the proposed design. A reference design without a piezoelectric film on the central-diaphragm is also implemented for comparison. Measurements indicate, in the low frequency range (before 4 kHz), the proposed designs have over 3 dB SPL enhancement due to the excitation of central-diaphragm. Moreover, compared to the reference design, proposed designs prevent the occurrence of an SPL zero near 10 kHz (between lower and higher modes) and achieve over 15 dB SPL enhancement. When the driving frequency exceeds the higher mode (14 kHz), the proposed design with the all-pass filter eliminates the SPL zero (at 16.8 kHz) with nearly 8 dB enhancement in the 15–18 kHz frequency range. Thus, this study demonstrates the bandwidth enhancement by the proposed microspeaker design with central-diaphragm actuation and all-pass filter integration.

On the Design of Piezoelectric MEMS Microspeaker for the Sound Pressure Level Enhancement

PIEZOELECTRIC MEMS MICROSPEAKER WITH SUSPENSION SPRINGS AND DUAL ELECTRODE TO ENHANCE SOUND PRESSURE LEVEL

Low Frequency Sound Pressure Level Improvement Of Piezoelectric Ems Microspeaker Using Novel Spiral Spring With Dual Electrode

On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications

On the design of piezoelectric mems microspeaker with high fidelity and wide bandwidth

Sound pressure and low frequency enhancement using novel pzt mems microspeaker design

Piezoelectric microspeaker using novel driving approach and electrode design for frequency range improvement

THD Improvement of Piezoelectric MEMS Speakers by Dual Cantilever Units with Well-Designed Resonant Frequencies

Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration

Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism

Bandwidth Enhancement of Piezoelectric Mems Microspeaker by Multiple Piston-Modes and Novel Crossover Driving Method

Monolithic Integration of PZT Actuation Units of Various Activated Resonances for Full-Range Mems Speaker Array

Less Resonant Frequency Shift and Minor SPL Attenuation of PZT Mems Speaker Achieved By Rib-Reinforced Diaphragm

A PZT MEMS loudspeaker with a quasi-closed diaphragm

Multi-Way In-Phase/Out-of-Phase Driving Cantilever Array for Performance Enhancement of PZT MEMS Microspeaker

On the Performance Enhancement of Piezoelectric MEMS Microphone Using S-Shape Slit Design

Two-Way Piezoelectric MEMS Microspeaker with Novel Structure and Electrode Design for Bandwidth Enhancement

Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies

Unsealed Piezoelectric MEMS Speaker with Rigid-Flexible Composite Membrane

Implementation of piezoelectric mems microphone for sensitivity and sensing range enhancement

On the PZT/Si Unimorph Cantilever Design for the Signal-to-noise Ratio Enhancement of Piezoelectric MEMS Microphone