Abstract:This study presents the piezoelectric microspeaker design consisted of the central-diaphragm, connecting-spring, and cantilever-plate actuators to create two resonances in the desired frequency range. In addition to the cantilever-plate actuator, the electrical routing and piezoelectric film are designed to drive the central-diaphragm independently. According to the stress distributions on the microspeaker structure for both lower and higher modes, the all-pass filter circuit is designed and implemented to manage the phase of input signals to the central-diaphragm, thereby changing the motion of the proposed design. Thus, the sound pressure level (SPL) beyond 1 kHz is improved and the SPL zero at specific frequency range is avoided. As a result, the bandwidth enhancement is achieved by the proposed microspeaker. Measurements are conducted under 0.707 V rms with 9 V DC driving voltage in standard ear simulator to evaluate the performances of the proposed design. A reference design without a piezoelectric film on the central-diaphragm is also implemented for comparison. Measurements indicate, in the low frequency range (before 4 kHz), the proposed designs have over 3 dB SPL enhancement due to the excitation of central-diaphragm. Moreover, compared to the reference design, proposed designs prevent the occurrence of an SPL zero near 10 kHz (between lower and higher modes) and achieve over 15 dB SPL enhancement. When the driving frequency exceeds the higher mode (14 kHz), the proposed design with the all-pass filter eliminates the SPL zero (at 16.8 kHz) with nearly 8 dB enhancement in the 15–18 kHz frequency range. Thus, this study demonstrates the bandwidth enhancement by the proposed microspeaker design with central-diaphragm actuation and all-pass filter integration.

Monolithic Integration of PZT Actuation Units of Various Activated Resonances for Full-Range Mems Speaker Array

Sound pressure and low frequency enhancement using novel pzt mems microspeaker design

Multi-Way In-Phase/Out-of-Phase Driving Cantilever Array for Performance Enhancement of PZT MEMS Microspeaker

On the design of piezoelectric mems microspeaker with high fidelity and wide bandwidth

PZT MEMS Speaker Integrated with Silicon-Parylene Composite Corrugated Diaphragm

On the Design of Piezoelectric MEMS Microspeaker for the Sound Pressure Level Enhancement

On the design of a two-way piezoelectric MEMS microspeaker based on a multi-shape cantilever array for high-frequency applications

A High-Spl Piezoelectric MEMS Loud Speaker Based on Thin Ceramic PZT

THD Improvement of Piezoelectric MEMS Speakers by Dual Cantilever Units with Well-Designed Resonant Frequencies

Piezoelectric microspeaker using novel driving approach and electrode design for frequency range improvement

Performance Optimization of Piezoelectric MEMS Speaker with Cantilever Diaphragm Array

Domain/Boundary Variation in Cantilever Array for Bandwidth Enhancement of PZT MEMS Microspeaker

Bandwidth enhancement of piezoelectric MEMS microspeaker via central diaphragm actuation and filter integration

Bandwidth Enhancement of Piezoelectric Mems Microspeaker by Multiple Piston-Modes and Novel Crossover Driving Method

PIEZOELECTRIC MEMS MICROSPEAKER WITH SUSPENSION SPRINGS AND DUAL ELECTRODE TO ENHANCE SOUND PRESSURE LEVEL

Using Reverse-Trapezoid Cantilevers and Sealed Back-Chamber to Enhance the Performance of Mems Piezoelectric Microspeaker at Ultra-High Frequencies

A Dual-Electrode Mems Speaker Based On Ceramic Pzt With Improved Sound Pressure Level By Phase Tuning

Optimization of Dual-electrode Ratio and Driving Phase of Piezoelectric MEMS Speakers for Improving Sound Pressure Level

Obtaining High SPL Piezoelectric MEMS Speaker via a Rigid-Flexible Vibration Coupling Mechanism

Unsealed Piezoelectric MEMS Speaker with Rigid-Flexible Composite Membrane

On the PZT/Si Unimorph Cantilever Design for the Signal-to-noise Ratio Enhancement of Piezoelectric MEMS Microphone