Abstract:This paper presents the resent advances in our research on ultralligh resolution laser confocal microscopy to further improve the accuracy of non-contact 3D measurement of micro-structural dimensions and profiles at the level of micron/nanometer with emphasis on ways and means to improve axial and lateral resolutions. A scan measuring technique based on differential confocal microscopy is developed using the difference in the distribution of the scanning spot on near and far confocal planes by keeping the detectors off-focus at equal distance before and after the conjugate image plane of the scanning spot. This differential confocal microscopic scan measuring technique can be used to double the measurement sensitivity and obviously expand the linear range to improve the axial resolution, and to locate the tracking zero point at the center of the linear range with the highest sensitivity to achieve the bipolar tracking properties. In addition, this new technique can be used to effectively suppress the light source intensity drift and detector electronic drift and noise to improve the S/N ratio. The differential confocal detection technique can be combined with the optical superresolving filtering technique to improve both lateral and axial resolutions, and the confocal detection technique based on micro optical arrays has a very promising potential application for improving of detection efficiency.

Three-Dimensional Resolution Limits and Image Contrast Mechanisms in Scanning Confocal Electron Microscopy

Three-Dimensional Resolution and Contrast-Enhanced Confocal Microscopy with Array Detection

Three-Dimension Resolution Enhanced Microscopy Based on Parallel Detection

Image Scanning Fluorescence Emission Difference Microscopy Based On A Detector Array

Advance and Prospect for Three-Dimensional Super-Resolution Microscopy

Compact Three-Dimensional Super-Resolution System Based on Fluorescence Emission Difference Microscopy

Three-Dimensional Super-Resolution Imaging for Fluorescence Emission Difference Microscopy

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Establishment of Annular Dark-Field Scanning Confocal Electron Microscopy using a Double Aberration-Corrected Microscope

The Future SEM Sees 3 Dimensions... Bringing Deconvolution Techniques to the Electron Microscope.

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Scanning Confocal Electron Microscopy (SCEM) Combined with Deconvolution Technique

Current Developments of Scanning Confocal Electron Microscopy in a Double Aberration-Corrected Transmission Electron Microscope

Three Dimensional Characterization of a Silica Hollow Sphere with an Iron Oxide Core by Annular Dark Field Scanning Confocal Electron Microscopy

Imaging and Elemental Mapping of Biological Specimens with the Hitachi HD-2300A Dual-EDS Scanning Transmission Electron Microscope

Optical Sectioning and Confocal Imaging and Analysis in the Transmission Electron Microscope

Recent Advances In Our Research On Ultrahigh Resolution Laser Confocal Microscopy

Image Contrast in Aberration-Corrected Scanning Confocal Electron Microscopy

3D Complete-Tilt Electron Tomography of Semiconductor Nanowires

Contrast in Atomically Resolved EF-SCEM Imaging

Energy-Filtered Scanning Confocal Electron Microscopy