3D Complete-Tilt Electron Tomography of Semiconductor Nanowires

Jinsong Wu,Sujing Xie,Eric R. Hemesath,Lincoln J. Lauhon,Vinayak P. Dravid

DOI: https://doi.org/10.1017/s1431927610057302

IF: 4.0991

2010-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

What problem does this paper attempt to address?

In-situ Fabrication, Manipulation and Property Measurements of Single Nanotubes and Nanowires with Near Atomic Resolution

L-M Peng,Q Chen,JY Wang,MS Wang,ZY Zhang,CH Jin,XL Wei

DOI: https://doi.org/10.1017/s1431927606069510

IF: 4.0991

2006-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005
Electron Tomography of Au-Catalyzed Semiconductor Nanowires

Jinsong Wu,Sonal Padalkar,Sujing Xie,Eric R. Hemesath,Jipeng Cheng,George Liu,Aiming Yan,Justin G. Connell,Eiko Nakazawa,Xiaofeng Zhang,Lincoln J. Lauhon,Vinayak P. Dravid

DOI: https://doi.org/10.1021/jp310816f

2013-01-01

Abstract:Electron tomography based on Z-contrast scanning transmission electron microscopy (STEM) can be applied to study 3D morphology of nanomaterials at high resolution, that is, 1 nm in all three spatial dimensions, to provide comprehensive insights into the structure of nanomaterials and their interfaces. Here, we report the 3D characterization of Au-catalyzed Ge and Si nanowires using a full-space tilting holder to address the "missing wedge" problem in STEM electron tomography. Electron tomography specimens were prepared by a novel two-step sample preparation process to minimize surface damage induced by focused ion beam (FIB) milling. The quality of specimen preparation protocol is demonstrated by the clear visibility of {112} facets in the reconstructed volume, and 3D morphology of Au nanoparticles on the nanowire surface. The 3D distribution of the Au nanoparticles on the coated Ge nanowires is also established. The integrated combination of innovative specimen preparation and full-tilt tomography represents a useful advance in the 3D analysis of nanostructures.
High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Kazu Suenaga,Yuta Sato,Zheng Liu,Masanori Koshino,Chuanhong Jin

2012-01-01

Abstract:Here we show how a high-resolution transmission electron microscopy can be applied to characterize the carbon nanostructures. Direct imaging of the hexagonal network of carbon nanotube enables us to determine the chiral index and to visualize the topological defects, such as pentagons and heptagons. Individual molecular imaging has also become possible, and atomic structure of fullerene molecules (C-60 and C-80) has been successfully identified at a single-molecular basis. Some recent progress for in situ observation of the carbon nanotube/fullerene growth and the defect dynamics is also presented.
Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Nathan Nakamura,Paul Szypryt,Amber L. Dagel,Bradley K. Alpert,Douglas A. Bennett,W. Bertrand Doriese,Malcolm Durkin,Joseph W. Fowler,Dylan T. Fox,Johnathon D. Gard,Ryan N. Goodner,J. Zachariah Harris,Gene C. Hilton,Edward S. Jimenez,Burke L. Kernen,Kurt W. Larson,Zachary H. Levine,Daniel McArthur,Kelsey M. Morgan,Galen C. O'Neil,Nathan J. Ortiz,Christine G. Pappas,Carl D. Reintsema,Daniel R. Schmidt,Peter A. Schultz,Kyle R. Thompson,Joel N. Ullom,Leila Vale,Courtenay T. Vaughan,Christopher Walker,Joel C. Weber,Jason W. Wheeler,Daniel S. Swetz

2024-03-04

Abstract:X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.

Instrumentation and Detectors
Electron Microscopy of Nanodevices: in Situ and Ex Situ Characterization of Structure and Transport Properties of Carbon Nanotubes

JM Zuo,T Kim,Q Chen,LM Peng,EA Olson

DOI: https://doi.org/10.1017/s1431927608082445

IF: 4.0991

2008-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008
Three-Dimensional Resolution Limits and Image Contrast Mechanisms in Scanning Confocal Electron Microscopy

PD Nellist,P Wang,G Behan,AI Kirkland,A Hashimoto,M Shimojo,K Mitsuishi,M Takeguchi,E Cosgriff,AJ D'Alfonso,LJ Allen,SD Findlay

DOI: https://doi.org/10.1017/s1431927610057533

IF: 4.0991

2010-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
Thermomechanical Modeling of Scanning Joule Expansion Microscopy Imaging of Single-Walled Carbon Nanotube Devices

Jizhou Song,Chaofeng Lu,Xu Xie,Yuhang Li,Yihui Zhang,Kyle L. Grosse,Simon Dunham,Yonggang Huang,William P. King,John A. Rogers

DOI: https://doi.org/10.1115/1.4024175

2013-01-01

Abstract:An analytical model, validated by experiments and finite element simulations, is developed to study the thermal imaging of single-walled carbon nanotube (SWNT) devices by scanning Joule expansion microscopy (SJEM). A simple scaling law for thermal expansion at low frequencies, which only depends on two nondimensional geometric parameters, is established. Such a scaling law provides a simple way to determine the surface temperature distribution and power dissipation per unit length in an SWNT from the measured thermal expansion in experiments. The results suggest the spatial resolution of the SJEM measurement is as good as ∼50 nm.
Electron Ptychographic Microscopy For Three-Dimensional Imaging

Si Gao,Peng Wang,Fucai Zhang,Gerardo T. Martinez,Peter D. Nellist,Xiaoqing Pan,Angus I. Kirkland

DOI: https://doi.org/10.1038/s41467-017-00150-1

IF: 16.6

2017-01-01

Nature Communications

Abstract:Knowing the three-dimensional structural information of materials at the nanometer scale is essential to understanding complex material properties. Electron tomography retrieves three-dimensional structural information using a tilt series of two-dimensional images. In this paper, we report an alternative combination of electron ptychography with the inverse multislice method. We demonstrate depth sectioning of a nanostructured material into slices with 0.34 nm lateral resolution and with a corresponding depth resolution of about 24-30 nm. This three-dimensional imaging method has potential applications for the three-dimensional structure determination of a range of objects, ranging from inorganic nanostructures to biological macromolecules.
Imaging Simulation of Charged Nanowires in TEM with Large Defocus Distance.

Te Shi,Shikai Liu,H. Tian,Z. J. Ding

DOI: https://doi.org/10.1093/jmicro/dfab008

2021-01-01

Microscopy

Abstract:In transmission electron microscope (TEM), both the amplitude and the phase of electron beam change when electrons traverse a specimen. The amplitude is easily obtained by the square root of the intensity of a TEM image, while the phase affects defocused images. In order to obtain the phase map and verify the theoretical model of the interaction between electron beam and specimen, a lot of simulations have to be performed by researchers. In this work, we have simulated defocus images of a SiC nanowire in TEM with the method of electron optics. Mean inner potential and charge distribution on the nanowire have been considered in the simulation. Besides, due to electron scattering, coherence loss of the electron beam has been introduced. A dynamic process with Bayesian optimization was used in the simulation. With the infocus image as input and by adjusting fitting parameters, the defocus image is determined with a reasonable charge distribution. The calculated defocus images are in a good agreement with the experimental ones. Here, we present a complete solution and verification method for solving nanoscale charge distribution in TEM.
Measuring and Quantitatively Analyzing the Electrical Characteristics of Individual Semiconducting Nanowires in an Nanowire Array

L-M Peng,Y Liu,S Wang,ZY Zhang,Q Li

DOI: https://doi.org/10.1017/s1431927608083931

IF: 4.0991

2008-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008
Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

Xu Xie,Kyle L. Grosse,Jizhou Song,Chaofeng Lu,Simon Dunham,Frank Du,Ahmad E. Islam,Yuhang Li,Yihui Zhang,Eric Pop,Yonggang Huang,William P. King,John A. Rogers

DOI: https://doi.org/10.1021/nn304083a

IF: 17.1

2012-01-01

ACS Nano

Abstract:Electrical generation of heat in single-walled carbon nanotubes (SWNTs) and subsequent thermal transport into the surroundings can critically affect the design, operation, and reliability of electronic and optoelectronic devices based on these materials. Here we investigate such heat generation and transport characteristics in perfectly aligned, horizontal arrays of SWNTs integrated into transistor structures. We present quantitative assessments of local thermometry at individual SWNTs in these arrays, evaluated using scanning Joule expansion microscopy. Measurements at different applied voltages reveal electronic behaviors, including metallic and semiconducting responses, spatial variations in diameter or chirality, and localized defect sites. Analytical models, validated by measurements performed on different device structures at various conditions, enable accurate, quantitative extraction of temperature distributions at the level of individual SWNTs. Using current equipment, the spatial resolution and temperature precision are as good as ∼100 nm and ∼0.7 K, respectively.
Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Jonathan Schwartz,Zichao Wendy Di,Yi Jiang,Jason Manassa,Jacob Pietryga,Yiwen Qian,Min Gee Cho,Jonathan L. Rowell,Huihuo Zheng,Richard D. Robinson,Junsi Gu,Alexey Kirilin,Steve Rozeveld,Peter Ercius,Jeffrey A. Fessler,Ting Xu,Mary Scott,Robert Hovden

DOI: https://doi.org/10.1038/s41467-024-47558-0

2024-06-18

Abstract:Measuring the three-dimensional (3D) distribution of chemistry in nanoscale matter is a longstanding challenge for metrological science. The inelastic scattering events required for 3D chemical imaging are too rare, requiring high beam exposure that destroys the specimen before an experiment completes. Even larger doses are required to achieve high resolution. Thus, chemical mapping in 3D has been unachievable except at lower resolution with the most radiation-hard materials. Here, high-resolution 3D chemical imaging is achieved near or below one nanometer resolution in a Au-Fe$_3$O$_4$ metamaterial, Co$_3$O$_4$ - Mn$_3$O$_4$ core-shell nanocrystals, and ZnS-Cu$_{0.64}$S$_{0.36}$ nanomaterial using fused multi-modal electron tomography. Multi-modal data fusion enables high-resolution chemical tomography often with 99\% less dose by linking information encoded within both elastic (HAADF) and inelastic (EDX / EELS) signals. Now sub-nanometer 3D resolution of chemistry is measurable for a broad class of geometrically and compositionally complex materials.

Computational Physics,Materials Science,Data Analysis, Statistics and Probability
Scanning Nano Beam Electron Diffraction and Applications to Characterization of High Entropy Alloys

H. Xing,K. Kim,J.M. Zuo,M.A. Hemphill,G.Y. Wang,C.W. Tsai,J.W. Yeh,K.A. Dahmen,P.K. Liaw

DOI: https://doi.org/10.1017/s143192761300559x

IF: 4.0991

2013-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
Imaging and Elemental Mapping of Biological Specimens with the Hitachi HD-2300A Dual-EDS Scanning Transmission Electron Microscope

JS Wu,AM Kim,RG Marvin,BD Myers,TK Woodruff,TV O'Halloran,VP Dravid,K McIlwrath,SY Li

DOI: https://doi.org/10.1017/s1431927610057648

IF: 4.0991

2010-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.
High-Spatial and High-Energy Resolution EELS Studies of Chemical and Electronic Properties of Interfaces and Nanostructures

K Dudeck,M Couillard,N Gauquelin,L Gunawan,S Hosseini Vajargah,S Lazar,D Rossouw,Y Shao,G Zhu,G Botton

DOI: https://doi.org/10.1017/s1431927611004843

IF: 4.0991

2011-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.
Single-shot, coherent, pop-out 3D metrology

Deepan Balakrishnan,See Wee Chee,Zhaslan Baraissov,Michel Bosman,Utkur Mirsaidov,N. Duane Loh

2023-10-20

Abstract:Three-dimensional (3D) imaging of thin, extended specimens at nanometer resolution is critical for applications in biology, materials science, advanced synthesis, and manufacturing. One route to 3D imaging is tomography, which requires a tilt series of a local region. Here we describe a coherent imaging alternative that recovers the 3D volume of a thin, homogeneously amorphous specimen with only a single, energy-filtered, bright-field image. We demonstrated this technique with a transmission electron microscope to fill a glaring gap for rapid, accessible, non-destructive 3D nanometrology. This technique is applicable, in general, to any coherent bright field imaging with electrons, photons, or any other wavelike particles.

Instrumentation and Detectors,Materials Science,Image and Video Processing,Optics
Electron tomography for functional nanomaterials

Robert Hovden,David A. Muller

DOI: https://doi.org/10.1557/mrs.2020.87

2020-06-02

Abstract:Modern nanomaterials contain complexity that spans all three dimensions - from multigate semiconductors to clean energy nanocatalysts to complex block copolymers. For nanoscale characterization, it has been a long-standing goal to observe and quantify the three-dimensional (3D) structure - not just surfaces, but the entire internal volume and the chemical arrangement. Electron tomography estimates the complete 3D structure of nanomaterials from a series of two-dimensional projections taken across many viewing angles. Since its first introduction in 1968, electron tomography has progressed substantially in resolution, dose, and chemical sensitivity. In particular, scanning transmission electron microscope tomography has greatly enhanced the study of 3D nanomaterials by providing quantifiable internal morphology and spectroscopic detection of elements. Combined with recent innovations in computational reconstruction algorithms and 3D visualization tools, scientists can interactively dissect volumetric representations and extract meaningful statistics of specimens. This article highlights the maturing field of electron tomography and the widening scientific applications that utilize 3D structural, chemical, and functional imaging at the nanometer and subnanometer length scales.

Applied Physics,Materials Science
Carbon Nanotube - Substrate Interface Characteristics Studied Via TEM

TS Zheleva,SJ Kilpatrick,MH Ervin,X Li,A Cao,PM Ajayan

DOI: https://doi.org/10.1017/s1431927606067262

IF: 4.0991

2006-01-01

Microscopy and Microanalysis

Abstract:Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005
Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography

Zehao Dong,Yang Zhang,Chun-Chien Chiu,Sicheng Lu,Jianbing Zhang,Yu-Chen Liu,Suya Liu,Jan-Chi Yang,Pu Yu,Yayu Wang,Zhen Chen

2024-06-07

Abstract:Real-space imaging of three-dimensional atomic structures is a critical yet challenging task in materials science. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like electron ptychography1,2, depth resolution remains limited to only 2 to 3 nanometers with a single projection setup3,4. Attaining better depth resolution typically necessitates large sample tilt angles and many projections, as seen in atomic electron tomography5,6. Here, we develop a new algorithm based on multislice electron ptychography which couples only a few projections at small tilt angles, but is sufficient to improve the depth resolution by more than threefold to the sub-nanometer scale, and potentially to the atomic level. This technique maintains high resolving power for both light and heavy atoms, and significantly improves the visibility of single dopants. We are thus able to experimentally detect dilute substitutional praseodymium dopants in a brownmillerite oxide, Ca2Co2O5, in three dimensions and observe the accompanying lattice distortion. This technique requires only a moderate level of data acquisition or processing, and can be seamlessly integrated into electron microscopes equipped with conventional components.

Materials Science,Mesoscale and Nanoscale Physics

3D Complete-Tilt Electron Tomography of Semiconductor Nanowires

In-situ Fabrication, Manipulation and Property Measurements of Single Nanotubes and Nanowires with Near Atomic Resolution

Electron Tomography of Au-Catalyzed Semiconductor Nanowires

High-Resolution Transmission Electron Microscopy Imaging Of Carbon Nanostructures

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

Electron Microscopy of Nanodevices: in Situ and Ex Situ Characterization of Structure and Transport Properties of Carbon Nanotubes

Three-Dimensional Resolution Limits and Image Contrast Mechanisms in Scanning Confocal Electron Microscopy

Thermomechanical Modeling of Scanning Joule Expansion Microscopy Imaging of Single-Walled Carbon Nanotube Devices

Electron Ptychographic Microscopy For Three-Dimensional Imaging

Imaging Simulation of Charged Nanowires in TEM with Large Defocus Distance.

Measuring and Quantitatively Analyzing the Electrical Characteristics of Individual Semiconducting Nanowires in an Nanowire Array

Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

Imaging 3D Chemistry at 1 nm Resolution with Fused Multi-Modal Electron Tomography

Scanning Nano Beam Electron Diffraction and Applications to Characterization of High Entropy Alloys

Imaging and Elemental Mapping of Biological Specimens with the Hitachi HD-2300A Dual-EDS Scanning Transmission Electron Microscope

High-Spatial and High-Energy Resolution EELS Studies of Chemical and Electronic Properties of Interfaces and Nanostructures

Single-shot, coherent, pop-out 3D metrology

Electron tomography for functional nanomaterials

Carbon Nanotube - Substrate Interface Characteristics Studied Via TEM

Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography