Abstract:Scanning Thermal Microscopy (SThM) uses micromachined thermal sensors integrated in a force sensing cantilever with a nanoscale tip can be highly useful for exploration of thermal management of nanoscale semiconductor devices. As well as mapping of surface properties of related materials. Whereas SThM is capable to image externally generated heat with nanoscale resolution, its ability to map and measure thermal conductivity of materials has been mainly limited to polymers or similar materials possessing low thermal conductivity in the range from 0.1 to 1 W/mK, with lateral resolution on the order of 1 \mum. In this paper we use linked experimental and theoretical approaches to analyse thermal performance and sensitivity of the micromachined SThM probes in order to expand their applicability to a broader range of nanostructures from polymers to semiconductors and metals. We develop physical models of interlinked thermal and electrical phenomena in these probes and then validate these models using experimental measurements of the real probes, which provided the basis for analysing SThM performance in exploration of nanostructures. Our study then highlights critical features of these probes, namely, the geometrical location of the thermal sensor with respect to the probe apex, thermal conductance of the probe to the support base, heat conduction to the surrounding gas, and the thermal conductivity of tip material adjacent to the apex. It is furthermore allows us to propose a novel design of the SThM probe that incorporates a carbon nanotube (CNT) or similar high thermal conductivity graphene sheet material positioned near the probe apex. The new sensor is predicted to provide spatial resolution to the thermal properties of nanostructures on the order of few tens of nm, as well as to expand the sensitivity of the SThM probe to materials with heat conductivity values up to 100-1000 W/mK.

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Quantitative Thermal Imaging of Single-Walled Carbon Nanotube Devices by Scanning Joule Expansion Microscopy.

Modeling of thermocapillary flow to purify single-walled carbon nanotubes

Coupled Thermomechanics Of Single-Wall Carbon Nanotubes

Investigation on self-heating effect in carbon nanotube field-effect transistors

Thermionic Energy Conversion with Nanoscale Materials and Devices

Thermal Analysis For Laser Selective Removal Of Metallic Single-Walled Carbon Nanotubes

Fundamental Effects in Nanoscale Thermocapillary Flow

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Laser-induced Nanoscale Thermocapillary Flow for Purification of Aligned Arrays of Single-Walled Carbon Nanotubes.

Nanoscale spatial resolution probes for Scanning Thermal Microscopy of solid state materials

Ultrahigh Convergent Thermal Conductivity of Carbon Nanotubes from Comprehensive Atomistic Modeling

Modeling Joule heating in carbon nanotubes with Monte Carlo simulations

Nanosecond nanothermometry in an electron microscope

Realizing the nanoscale quantitative thermal mapping of scanning thermal microscopy by resilient tip-surface contact resistance models.

Scanning Electron Microscopy Imaging of Single-Walled Carbon Nanotubes on Substrates

Comprehensive modeling of Joule heated cantilever probes

Understanding the resolution and sensitivity in photothermal nanoscale chemical imaging - a point spread function approach

Electron Thermal Microscopy

Ab Initio Modeling of the Interaction of Electron Beams and Single-Walled Carbon Nanotubes.

Scanning Tunneling Thermometry