Image Contrast in Aberration-Corrected Scanning Confocal Electron Microscopy

E.C. Cosgriff,Peter D. Nellist,Adrian J. D’Alfonso,S.D. Findlay,G. Behan,Peng Wang,L. J. Allen,Angus I. Kirkland
DOI: https://doi.org/10.1016/s1076-5670(10)62002-2
2010-01-01
Advances in Imaging and Electron Physics
Abstract:The larger objective lens numerical aperture allowed by spherical aberration correction in electron optics leads to a reduced depth of focus, which typically becomes less than the thickness of the sample. Although this may complicate image interpretation, it leads to an opportunity to measure three‐dimensional information though the technique of optical sectioning. This chapter presents a theoretical analysis of transfer functions and image contrast for aberration‐corrected scanning confocal electron microscopy (SCEM). A comparison is made to optical sectioning using conventional scanning transmission electron microscopy (STEM). It is shown that for bright‐field SCEM there is little contrast, and a missing cone in the transfer function that is also seen for STEM. Energy‐filtered SCEM is seen to have strong transfer and no missing cone in the transfer function.
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