Abstract:In electron microscopy high-resolution imaging of finest object structures is generally hampered by the influence of aberrations of the lens system, especially the high spherical aberration of the objective lens. The delocalization of contrast details induced by aberrations is especially strong for microscopes equipped with a field emission gun providing a high spatial coherence. in recent years a prototype of an aberration correction system has been constructed by Haider et al., following a suggestion by Rose, consisting of two hexapole elements and four additional round lenses. The correction system was adapted to a Philips CM 200 FEG ST microscope with an information limit of 0.13 nm. The alignment is carried out using aberration measurements deduced from Zemlin tableaus. By appropriately exciting the hexapole elements it is possible to reduce or even fully compensate the spherical aberration of the objective lens. With the freedom of a variable spherical aberration C s new operation modes can be accessed that are not available in standard microscopes. with C s = 0 and defocus Z = 0 pure amplitude contrast occurs, together with a vanishing contrast delocalization; phase contrast with a single, narrow pass-band up to the information limit can still be achieved by Z = ±7 nm, which introduces a delocalization of R = 0.13 nm. with Cs = 97 μm and Z = −18 nm the broad Scherzer pass-band for phase contrast can be extended to the information limit, with R = 0.35 nm. For the CM 200 C s = 43 fim and Z = −12 nm still produces a high level of phase contrast, comparable with the extended Scherzer pass-band, but with R = 0.08 nm only. in the latter mode Scherzer’s defocus equals Lichte's defocus of least confusion.

Chromatic Confocal Electron Microscopy with A Finite Pinhole Size

Bright-field Scanning Confocal Electron Microscopy Using a Double Aberration-Corrected Transmission Electron Microscope

A Novel Method for Enhancing the Lateral Resolution and Image SNR in Confocal Microscopy

Image Contrast in Aberration-Corrected Scanning Confocal Electron Microscopy

Fluorescence emission difference with defocused surface plasmon-coupled emission microscopy.

Contrast in Atomically Resolved EF-SCEM Imaging

Optimization for Imaging Through Scattering Media for Confocal Microscopes with Divided Elliptical Apertures.

Improvements in Confocal Microscopy Imaging Using Serrated Divided Apertures

High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

Optical Sectioning and Confocal Imaging and Analysis in the Transmission Electron Microscope

Scanning Confocal Electron Microscopy (SCEM) Combined with Deconvolution Technique

Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy

Three-Dimensional Crystal Structure Mapping by Diffractive Scanning Confocal Electron Microscopy (SCEM)

Three-dimensional Observation of SiO2 Hollow Spheres with a Double-Shell Structure Using Aberration-Corrected Scanning Confocal Electron Microscopy

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

A new aberration-corrected, energy-filtered LEEM/PEEM instrument. I. Principles and design

Chromatic Aberration and Low-Voltage SEM

Techniques and Applications of Chromatic Confocal Microscopy

Aberration-Corrected Scanning Transmission Electron Microscopy: from Atomic Imaging and Analysis to Solving Energy Problems

Bringing Deconvolution Algorithmic Techniques to the Electron Microscope

Three-Dimensional Analysis of Nanoparticles on Carbon Support Using Aberration-Corrected Scanning Confocal Electron Microscopy