Three-Dimensional Crystal Structure Mapping by Diffractive Scanning Confocal Electron Microscopy (SCEM)

Lewys Jones,Peng Wang,Peter D. Nellist
DOI: https://doi.org/10.1088/1742-6596/371/1/012003
2012-01-01
Journal of Physics Conference Series
Abstract:Recently a diffracted-probe scanning confocal electron microscopy (SCEM) mode was demonstrated. Analysis of such diffracted-probe images yields the sample height (defocus), thickness and crystal orientation. An extension of this principle for three-dimensional (3D) mapping is described and preliminary bicrystal data presented. Additional experimental criteria are discussed and the 3D resolution of this new diffractive SCEM mapping is derived and was found to be ≈20 nm and is comparable with 3D FIB-EBSD in terms of both field-of-view, spatial resolution and acquisition time.
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