Permittivity Measurement of Ferroelectric Thin Film Based on Cpw Transmission Line

Y. Q. Wu,Z. X. Tang,Y. H. Xu,X. He,B. Zhang
DOI: https://doi.org/10.1163/156939308784150272
2008-01-01
Journal of Electromagnetic Waves and Applications
Abstract:The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al2O3 is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (epsilon'(r) and epsilon ''(r)) are less than 1%.
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