Permittivity measurement of Ba

Zheyao Wang,Jianshe Liu,Litian Liu
DOI: https://doi.org/10.1109/TIM.2005.859144
IF: 5.6
2006-01-01
IEEE Transactions on Instrumentation and Measurement
Abstract:This paper presents a method for measuring the complex permittivity of Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/ (BST) ferroelectric thin films on a four-layered substrate at frequencies from 50 MHz to 26.5 GHz. Coplanar waveguide (CPW) lines are employed to measure the permittivity at high frequencies, whereas at low frequencies interdigital capacitors (IDCs) are used instead to avoid the calibration erro...
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