Dielectric characterization of a ferroelectric film in the sub-GHz region

P Bao,T J Jackson,M J Lancaster
DOI: https://doi.org/10.1088/0022-3727/41/18/185410
2008-01-01
Abstract:A new method is proposed for the measurement of the dielectric properties of Ba(x)Sr(1-x)TiO(3) (BST) thin films in the frequency range 10(6)-1.8 x 10(9) Hz. A co-planar waveguide (CPW) transmission line was employed for impedance measurements via on-wafer probing. The measured impedance of the CPW line was found as a function of the probing position on the line. A simplified model of the CPW line under test allows the intrinsic dielectric properties of BST thin films to be extracted from the measured position-dependent impedance. Experimental results obtained by this new method agree well with those obtained by two-port S-parameters measurement at microwave frequencies using the same CPW structure.
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