Fabrication of LaB6 Tip Field Emission Arrays Using Electro-chemical Etching Method
WANG Xiao-ju,LIN Zu-lun,QI Kang-cheng,CHEN Ze-xiang,WANG Zhi-gang,JIANG Ya-dong
DOI: https://doi.org/10.3321/j.issn:1000-7032.2007.03.028
2007-01-01
Chinese Journal of Luminescence
Abstract:At present, field emitting cold cathode materials, including molybdenum, silicon, diamond carbon films, diamond-like carbon films and carbon nanotubes, are being developed. With each of these materials having their own shortages, it is important to seek some new field emitting cold cathode materials. Lanthanum hexaboride (LaB6) is a material with low work function, low resistivity, low sputtering yield, high melting point and high chemical stability. It has been widely used as thermionic emitters. On the other hand, LaB6 is also an excellent material for use as field emission cathodes. Some field emitting cold cathode single tips in-cluding LaB6, molybdenum, tungsten and tungsten rhenium were fabricated by using electro-chemical etching method. The electron emission characteristics of these cold cathodes were studied in a diode test cell in vacuum system. Changing the anode voltage at a pressure of 1×10-3 Pa, the current density of single crystal LaB6 was compared with other material cathodes. It showed that LaB6 was one kind of excellent materials to act as field emitting cold cathode, whose current density was much higher than any other materials. In addition, LaB6 field emission arrays were attempted to be fabricated by using electro-chemical etching method. The a-type si-licon layer was depositing by PECVD as mask. Electrolytes in this process were ethanol (CH3CH2OH) containing 2% hydrochloric acid (HCl) and the electrolytic current was 0.6 mA. The SEM showed that the substrate and surface of single crystal LaB6 tips were both smooth. The height of LaB6 tips was about 1.7 μm. The uniformity of the tips was fine, while due to the erosion selectivity for different crystalloid surface in electro-chemical etching method, serious anisotropic phenomenon was observed for LaB6 tips. It demonstrated that, seeking some new electrolytes or using other special dry etching methods instead of wet etching methods, maybe effective to fabricate excellent LaB6 field emitting cold cathode tips. These experimental conclusions were constructive to direct the application of LaB6 to field emission cathodes further.