Large-area Uniform Hydrogen-Free Diamond-Like Carbon Films Prepared by Unbalanced Magnetron Sputtering for Infrared Anti-Reflection Coatings

Junqi Xu,Huiqing Fan,Weiguo Liu,Lingxia Hang
DOI: https://doi.org/10.1016/j.diamond.2007.12.010
2007-01-01
Abstract:The hydrogen-free diamond-like carbon (DLC) films are potential materials to be used as infrared anti-reflection protective coatings if their optical absorption can be reduced to get relatively thick films needed. In this study, hydrogen-free DLC films were deposited in an unbalanced magnetron sputtering (UBMS) system. The results of film thickness uniformity showed that this system is capable of depositing uniform films larger than 150 mm in diameter. The infrared transmission spectra of DLC films indicating that transparent films were obtained in the infrared region for the single side DLC coated on the silicon and germanium substrates, and about 68.83% and 63.05% transmittance were achieved respectively at the wave number of 2983/cm, close to theoretical value for non-absorption carbon material. No obvious absorption peaks were found between 5000 and 800 /cm. These excellent characteristics show that the hydrogen-free DLC films prepared in the UBMS system were suitable for infrared transmission enhancement applications.
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