Investigation on Preparation and Properties of Thick DLC Film in Medium-Frequency Dual-Magnetron Sputtering

X Yu,Y Liu,CB Wang,XC Lu,DY Yu
DOI: https://doi.org/10.1016/j.vacuum.2005.06.002
IF: 4
2005-01-01
Vacuum
Abstract:Chromium-doped DLC film of about 6μm in thickness was deposited using a medium-frequency dual-magnetron sputtering. The basic condition was Cr and C target powers in a range of 2–5kW and substrate bias voltage held at −100V in unipolar mode. Surface morphology, microstructure, hardness, adhesion, and friction property were investigated for the DLC film to be used as protective coating in industrial applications such as cutting tools, forming dies, etc. The thick DLC film with graded and multilayered structure exhibited some advisable properties: Vickers hardness was 1560kg/mm2 at 250g; adhesion was 52N (Lc), a majority of film maintained at the end stage of scratch test; friction coefficient was 0.09, maintained in a long sliding endurance.
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