Abstract:Diamond-like carbon(DLC) thin film was deposited on the surface of 20CrNiMo alloy by hollow cathode glow discharge technique.High purity graphite was selected as the cathode and Ar as working gas.The structure of the DLC thin film was analyzed by laser Raman spectroscopy.Surface morphology of the film was observed by atomic force microscope(AFM).The adhesion between the DLC thin film and the substrate was investigated with scratch testing.The morphology of the scratch was observed by scanning electron microscopy(SEM).Friction and wear behavior of the DLC thin film under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig.The results show that it is feasible to prepare a DLC thin film of 0.6 μm thick by this experimental process.The surface roughness Ra of the film is 7-8 nm.The DLC thin film has a good adhesion with critical load of 52 N by scratch testing.Excellent friction and wear-resistant behavior of the film is observed.Friction coefficient of the 20CrNiMo substrate is about 0.50 under dry sliding against steel,while the DLC thin film exhibited much lower friction coefficient of 0.15 under the same testing condition.

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