The Proton Magnetic Resonance Study for Hydrogen Behavior in Three Hydrogenated Silicon Films

QX XUAN,H XIA,XK ZHANG,D FENG
DOI: https://doi.org/10.1016/0038-1098(92)90078-n
IF: 1.934
1992-01-01
Solid State Communications
Abstract:The proton magnetic resonance spectrum of three hydrogenated silicon films (nc-Si:H, a-Si:H, annealed a-Si:H) were presented, which confirm the compositional inhomegeneity for hydrogen in the dilute and clustered phase. The deposition or post preparation condition was important for the formation of the clustered SiH phase, not only for the spatial distance between SiH bond, but for some subtle structure in NMR spectrum. The hydrogen glass behavior in silicon films was essential for the explanation of experimental results.
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