Abstract:Ex situ characterization techniques in molecular beam epitaxy (MBE) have inherent limitations, such as being prone to sample contamination and unstable surfaces during sample transfer from the MBE chamber. In recent years, the need for improved accuracy and reliability in measurement has driven the increasing adoption of in situ characterization techniques. These techniques, such as reflection high-energy electron diffraction, scanning tunneling microscopy, and X-ray photoelectron spectroscopy, allow direct observation of film growth processes in real time without exposing the sample to air, hence offering insights into the growth mechanisms of epitaxial films with controlled properties. By combining multiple in situ characterization techniques with MBE, researchers can better understand film growth processes, realizing novel materials with customized properties and extensive applications. This review aims to overview the benefits and achievements of in situ characterization techniques in MBE and their applications for material science research. In addition, through further analysis of these techniques regarding their challenges and potential solutions, particularly highlighting the assistance of machine learning to correlate in situ characterization with other material information, we hope to provide a guideline for future efforts in the development of novel monitoring and control schemes for MBE growth processes with improved material properties.

A Multi-Technique Study of the Surface Preparation of InSb Substrate and Subsequently Grown CdTe Films by Molecular Beam Epitaxy

Study of Surface Oxidation of PbTe Films

Study on Micro-Structural Properties of Pbte/Cd0.98zn0.02te (111) Hetero-System Grown by Molecular-Beam Epitaxy

Study of Growth of [111]-Oriented CdTe Thin Films by MBE

Development of in situ characterization techniques in molecular beam epitaxy

Molecular Beam Epitaxy and Micro-Structural Characterizations for PbSe Single Crystal Films

Water-assisted Exfoliation of Epitaxial CdTe Film from Mica Analyzed with Azimuthal RHEED

Surface and Interface Properties of InSb Epitaxial Thin Films Grown on Gaas by Low Pressure Metalorganic Chemical Vapor Deposition

Molecular Beam Epitaxy and Characterizations of PbTe Grown on GaAs(211) Substrates Using CdTe/ZnTe Buffers

Microstructural Properties of Single Crystalline Pbte Thin Films Grown on Baf2(111) by Molecular Beam Epitaxy

Reconstructions and Stabilities of PbTe(1 1 1) Crystal Surface from Experiments and Density-Functional Theory

Study of Monocrystalline CdTe films grown by ICB epitaxy

Observation of regular defects formed on the surface of PbTe thin films grown by molecular beam epitaxy

Influence of Surface Structures on Quality of CdTe(100) Thin Films Grown on GaAs(100) Substrates

A surface and interface study on the InSb/GaAs heterostructures

Ion Beam Nanostructuring of HgCdTe Ternary Compound

Growth of Hg0.7Cd0.3Te on Van Der Waals Mica Substrates via Molecular Beam Epitaxy

Growth of Cdte-Films on Gaas by Ionized Cluster Beam Epitaxy

Electronic Structure and Epitaxy of CdTe Shells on InSb Nanowires

Termination of Single Crystal Bi2Se3 Surfaces Prepared by Various Methods

A microstructural study on the surface and interface of CdTe/CdS solar cells