Abstract:A mechanistic understanding of interactions be-tween atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDs) and their growth substrates is important for achieving the unidirectional alignment of nuclei and seamless stitching of 2D TMD domains and thus 2D wafers. In this work, we conduct a cross-sectional scanning transmission electron microscopy (STEM) study to investigate the atomic-scale nucleation and early stage growth behaviors of chemical vapor deposited monolayer (ML-) MoS2 and molecular beam epitaxy ML-MoSe2 on a Au(111) substrate. Statistical analysis reveals the majority of as-grown domains, i.e., similar to 88% for MoS2 and 90% for MoSe2, nucleate on surface terraces, with the rest (i.e., similar to 12% for MoS2 and 10% for MoSe2) on surface steps. Moreover, within the latter case, step-associated nucleation, similar to 64% of them are terminated with a Mo-zigzag edge in connection with the Au surface steps, with the rest (similar to 36%) being S-zigzag edges. In conjunction with ab initio density functional theory calculations, the results confirm that van der Waals epitaxy, rather than the surface step guided epitaxy, plays deterministic roles for the realization of unidirectional ML-MoS2 (MoSe2) domains on a Au(111) substrate. In contrast, surface steps, particularly their step height, are mainly responsible for the integrity and thickness of MoS2/MoSe2 films. In detail, it is found that the lateral growth of monolayer thick MoS2/MoSe2 domains only proceeds across mono-Au-atom high surface steps (similar to 2.4 angstrom), but fail for higher ones (bi-Au atom step and higher) during the growth. Our cross-sectional STEM study also confirms the existence of considerable compressive residual strain that reaches similar to 3.0% for ML-MoS2/MoSe2 domains on Au(111). The present study aims to understand the growth mechanism of 2D TMD wafers.

Water-assisted Exfoliation of Epitaxial CdTe Film from Mica Analyzed with Azimuthal RHEED

2D Reciprocal Space Map of Etched Metalorganic Chemical Vapor Deposited CdTe(001) Film Surface on Miscut GaAs(001)

Epitaxial CdTe Thin Films on Mica by Vapor Transport Deposition for Flexible Solar Cells

Metalorganic Vapor Phase Epitaxy of Large Size CdTe Grains on Mica Through Chemical and Van Der Waals Interactions

Atomistic Insight into the Epitaxial Growth Mechanism of Single-Crystal Two-Dimensional Transition-Metal Dichalcogenides on Au(111) Substrate

Growth of Hg0.7Cd0.3Te on Van Der Waals Mica Substrates via Molecular Beam Epitaxy

Study of Surface Oxidation of PbTe Films

Study on Micro-Structural Properties of Pbte/Cd0.98zn0.02te (111) Hetero-System Grown by Molecular-Beam Epitaxy

X-ray diffraction topography and etched surface morphology of CdZnTe single crystals

Study of Growth of [111]-Oriented CdTe Thin Films by MBE

Reconstructions and Stabilities of PbTe(1 1 1) Crystal Surface from Experiments and Density-Functional Theory

Study of Monocrystalline CdTe films grown by ICB epitaxy

Influence of Surface Structures on Quality of CdTe(100) Thin Films Grown on GaAs(100) Substrates

X-ray Double-Crystal Diffraction Studies of CdTe/GaAs Heteroepitaxial Layers

Growth of Topological Crystalline Insulator SnTe Thin Films on Si(111) Substrate by Molecular Beam Epitaxy

Ultrahigh-Detectivity Photodetectors with Van Der Waals Epitaxial CdTe Single-Crystalline Films

Microstructural Properties of Single Crystalline Pbte Thin Films Grown on Baf2(111) by Molecular Beam Epitaxy

Study on the Growth of A CdTe Epilayer on (100) and (111) Oriented GaAs by MOCVD

Heteroepitaxy of Cdte on Tilting Si(211) Substrates by Molecular Beam Epitaxy

Van der Waals Epitaxy and Photoresponse of Hexagonal Tellurium Nanoplates on Flexible Mica Sheets

Adsorption, desorption, and interdiffusion in atomic layer epitaxy of CdTe and CdZnTe