MEMS-Based Integrated Optical Fiber Connector

CAI Yu-li,DING Gui-fu,DAI Xu-han,GU Dong-hua,YAO Jin-yuan,ZHANG Dan
DOI: https://doi.org/10.3969/j.issn.1005-9490.2007.02.021
2007-01-01
Abstract:An optical fiber connector based on MEMS technology is presented.Nickel thin film cover plate is integrated manufactured above the silicon V-shaped groove.The bell-mouthed crimping channel facilitates the insertion and pulling of optical fiber.The clamping channel of the middle flatly segment makes the precise position and self splicing come true.The devices are not only small and integrated manufacturable but well reproducible as well.The insertion loss is less than 0.3 dB.The microstructure design keys and process flows of the self-adaptable integrated optical fiber connector are made emphasis on to be presented.
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