A Planar Integration SiGe HBT with High Current Gain

ZHAO An-bang,TAN Kai-zhou,WU Guo-zeng,LI Rong-qiang,ZHANG Jing,ZHONG Yi,LIU Dao-guang
DOI: https://doi.org/10.3969/j.issn.1004-3365.2006.05.009
2006-01-01
Abstract:A planar integration SiGe HBT with polysilicon emitter is fabricated,which has a current gain greater than 1 500 at room temperature and even up to 2 800 at its maximum.Its V_(ceo) is 5 V and Early voltage is greater than 10 V,and the βV_A product exceeds 15 000.This HBT is very sensitive to As distribution in the polysilicon(emitter region.)
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