Development on Si/SiGe heterojunction bipolar transistors

Pei YANG,Kai LI,Lin HE,Dao LIU,Jing ZHANG,Jing LI,Meng XIE,Mo YANG
DOI: https://doi.org/10.3969/j.issn.1007-4252.2002.02.007
2002-01-01
Abstract:Through computer aided simulation and processing experiment, the structure parameters of Si/SiGe HBT were optimized carefully. An intrinsic space layer and a novel Ge fraction profile are used to reduce the influence of boron outdiffusion, base recombination and HBE. A SiGe HBT process compatible with conventional Si processes is developed, by which the SiGe HBT is fabricated successfully. The results of test indicated that the current gain β is 50 and the cut- off frequency f T is 5.1 GHz.
What problem does this paper attempt to address?