Comparison Between Mbe-Based Sige/Si Hbt And Si-Based Bipolar Transistor Technologies

daoguang liu,kaicheng li,weixin ni,yue hao,jing zhang,zhengfan zhang,shiliu xu,gangyi hu,lin guo
DOI: https://doi.org/10.1109/ICSICT.2001.981557
2001-01-01
Abstract:In the paper, the comparison between MBE-based SiGe/Si heterojunction bipolar transistors (HBT) technologies and Si bipolar transistors technologies is made. The SiGe/Si film used in the present work was grown by solid source molecular beam epitaxy (MBE) system. 3mum process technology was used to develop SiGe HBT devices. The experimental results indicate that both the direct current (DC) characteristics and the cutoff frequency of SiGe HBT are satisfactory. The current gain P of HBT devices is 50, when the collector voltage V-c=2 V and the collector current I-c=5 mA. The cutoff frequency f(T)=5.1 GH(z). And the uniformity of the cutoff frequency of HBT is quite good. With the same layout, 3 P in process technology was used to develop Si bipolar transistror devices. The measured results show that the cutoff frequency f(T) of the Si devices is 1.5GH(z).
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