A Multi-Finger Si1-xGex/Si Heterojunction Bipolar Transistor for Wireless Power Amplifier Applications

Chunlai Xue,Wenhua Shi,Fei Yao,Buwen Cheng,Hongjie Wang,Jinzhong Yu,Qiming Wang
DOI: https://doi.org/10.3321/j.issn:0253-4177.2007.04.005
2007-01-01
Chinese Journal of Semiconductors
Abstract:A large area multi-finger configuration power SiGe HBT device (with an emitter area of about 880μm2) was fabricated with 2μm double-mesa technology. The maximum DC current gain β is 214. The BVCEO is up to 10V,and the BVCBO is up to 16V with a collector doping concentration of 1×1017 cm-3 and collector thickness of 400nm. The device exhibits a maximum oscillation frequency fmax of 19.3GHz and a cut-off frequency fT of 18.0GHz at a DC bias point of IC = 30mA and VCE = 3V. MSG (maximum stable gain) is 24.5dB,and U (Mason unilateral gain) is 26.6dB at 1GHz. Due to the novel distribution layout,no notable current gain fall-off or thermal effects are observed in theⅠ-Ⅴ characteristics at high collector current.
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