Abstract:Hydrogenated amorphous carbon films have many unique properties, they have attracted much attention because of their applications in many kinds of optoelectronic devices such as light emitting diodes and field emission devices. It was well known that the film structures and properties were varied in a wide range by changing many factors such as hydrogen content and treatment. In this paper, the influence of hydrogen dilution on the optical properties of a-C: H films was studied. The a-C: H films were prepared in a capacitance coupled plasma enhanced vapor chemical deposition system at 13. 56MHz. The gas mixture of CH4 and H2 was used as source and the flow rate of the H2 was changed. The structures and optical properties were investigated by Fourier-transform infrared spectra, photoluminescence spectra and optical absorption spectra. It was concluded that hydrogen dilution can, to some extent, etch the weak bonds in films, decrease the size of sp2 clusters, and increase the sp3 C-Hn con- tent which results in the increase of the optical band gap of a-C: H films. The optical band gap increased from 2. 57eV to 2. 72eV with increasing hydrogen dilution ratio. Consequently, the PL peak energy has a blue shift from 2. 5eV to 2. 75eV under the excitation with 3.54eV light. The further increase of the hy- drogen dilution will induce the change of the bonding configurations in the carbon films, which results in the multiple PL bands in the luminescence spectra at room temperature. The a-C: H films include both sp3 C-C, C-H and sp2 carbon related clusters. The C=C bonds can exist in the form of olefinic chains, six- fold ring aromatic species et al. Under different hydrogen dilution conditions, the main C= C structure in the sp2 clusters was different, which induces the different structures and optical properties of a-C:H films.

Novel photoluminescence from hydrogenated amorphous carbon films prepared by using xylene source

Fabrication of amorphous carbon films by using organic hydrocarbon source

Microstructures and Photoluminescence of Hydrogenated Amorphous Carbon Films Produced by Using Organic Hydrocarbon Source

Novel Luminescence Properties of A-C:H Films Produced by Using an Organic Source at Various Substrate Temperatures

Preparation of Amorphous Carbon Films by Layer-By-Layerhydrogen Plasma Annealing Method and Their Luminescence Properties

Photoluminescence in Hydrogenated Amorphous Carbon

Highly luminescent hydrogenated amorphous carbon (a-C:H) thin films

Blue-green luminescence and SERS study of carbon-rich hydrogenated amorphous silicon carbide films with multiphase structure

The change of photoluminescence characteristics of amorphous carbon films due to hydrogen dilution

Red–green–blue Light Emission from Hydrogenated Amorphous Silicon Carbide Films Prepared by Using Organic Compound Xylene As Carbon Source

Structure and Luminescence Properties of an Amorphous Hydrogenated Carbon

Photoluminescence Behavior Of Hydrogenated Amorphous Carbon

Photoluminescence of Amorphous Carbon Films Fabricated by Layer-By-Layer Hydrogen Plasma Chemical Annealing Method

Bright Blue Photoluminescence from the Amorphous Carbon Via Surface Plasmon Enhancement

Blue Light Emission from Hydrogenated Amorphous Silicon Carbide Prepared by Xylene Source in Plasma-Enhanced Chemical Vapour Deposition System

Blue Light Emission From Hydrogenated Amorphous Silicon Carbide Produced By Organic Source

Green and Blue Light Emitting from Hydrogenated Amorphous Carbon Films Diluted by Hydrogen

Gas Barrier Properties of Amorphous Hydrogenated Carbon Films by Plasma -Enhanced CVD

Amorphous carbon-based films with surface-plasmon-enhanced full-color photoluminescence

Improvement of electron field emission from amorphous carbon films due to hydrogen plasma chemical annealing effect

The Effect of Relatively Low Hydrogen Dilution on the Properties of Carbon-Rich Hydrogenated Amorphous Silicon Carbide Films