Abstract:Hydrogenated amorphous carbon films have many unique properties, they have attracted much attention because of their applications in many kinds of optoelectronic devices such as light emitting diodes and field emission devices. It was well known that the film structures and properties were varied in a wide range by changing many factors such as hydrogen content and treatment. In this paper, the influence of hydrogen dilution on the optical properties of a-C: H films was studied. The a-C: H films were prepared in a capacitance coupled plasma enhanced vapor chemical deposition system at 13. 56MHz. The gas mixture of CH4 and H2 was used as source and the flow rate of the H2 was changed. The structures and optical properties were investigated by Fourier-transform infrared spectra, photoluminescence spectra and optical absorption spectra. It was concluded that hydrogen dilution can, to some extent, etch the weak bonds in films, decrease the size of sp2 clusters, and increase the sp3 C-Hn con- tent which results in the increase of the optical band gap of a-C: H films. The optical band gap increased from 2. 57eV to 2. 72eV with increasing hydrogen dilution ratio. Consequently, the PL peak energy has a blue shift from 2. 5eV to 2. 75eV under the excitation with 3.54eV light. The further increase of the hy- drogen dilution will induce the change of the bonding configurations in the carbon films, which results in the multiple PL bands in the luminescence spectra at room temperature. The a-C: H films include both sp3 C-C, C-H and sp2 carbon related clusters. The C=C bonds can exist in the form of olefinic chains, six- fold ring aromatic species et al. Under different hydrogen dilution conditions, the main C= C structure in the sp2 clusters was different, which induces the different structures and optical properties of a-C:H films.

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Novel Luminescence Properties of A-C:H Films Produced by Using an Organic Source at Various Substrate Temperatures