Defects and Microvoids in A-Si and A-Si:H

AL JUNG,YH WANG,G LIU,JJ XIONG,BS CAO,WZ YU,D ADLER
DOI: https://doi.org/10.1016/0022-3093(85)90396-5
IF: 4.458
1985-01-01
Journal of Non-Crystalline Solids
Abstract:We report the first measurements of positron-annihilation spectra of samples of both pure and hydrogenated amorphous silicon. Comparison of these spectra with that of crystalline silicon indicates that the lowest-lifetime component can be identified as the contribution mainly from valence-band electrons. Both the pure (a-Si) and the hydrogenated (a-Si:H) samples exhibit a component with intermediate lifetime, which we attribute to small vacancies consisting of about 4 missing atoms. Finally, only a-Si:H shows a significant long-lived line (τ > 5 ns), which arises from large microvoids, with ∼ 100 missing atoms. The existence of these microvoids in a-Si:H is consistent with recent reports of the presence of occluded H2 gas under high pressure in such films.
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